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以NiFeNb为种子层,制备(Ni79Fe21)1-xNbx(5nm)/(Ni79Fe21)(20nm)/Ta(3nm)系列膜,并对其颗粒大小、磁滞回线及表面粗糙度等进行测量,探讨种子层中Nb含量x对坡莫合金磁滞回线的影响.结果表明,以NiFeNb作种子层能更好地改善坡莫合金的微结构.Nb含量为23%时的磁滞回线有最小的最大磁能积、矫顽力.种子层影响坡莫合金磁滞回线的一个重要原因是脱附激活能等因素造成种子层具有不同的表面粗糙度,进而使坡莫合金具有不同的微结构和磁性能.
(Ni79Fe21) 1-xNbx (5nm) / (Ni79Fe21) (20nm) / Ta (3nm) films were prepared with NiFeNb as the seed layer, and their particle size, hysteresis loop and surface roughness were measured. The influence of Nb content in seed layer on the hysteresis loop of permalloy was studied.The results show that the microstructure of permalloy can be improved by using NiFeNb as seed layer.The magnetic hysteresis loop with 23% Of the maximum magnetic energy product, coercive force.A seed layer affecting permalloy hysteresis loop is an important reason for desorption activation energy and other factors caused by the seed layer has a different surface roughness, and then make permalloy have different microstructures And magnetic properties.