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一、问题提出以等厚干涉方法测量平晶平面度,常在平面干涉仪上进行,与标准平晶作比较,观察视野内通过直径干涉带的弯曲大小。计算方法:以干涉带弯曲的大小与两条干涉带间的距离的比值乘以λ/2,即为其平面度偏差(λ为光波波长)。当缺少标准平晶时,也可用三面法检定。三块平晶分别为Ⅰ、Ⅱ、Ⅲ,它们在同一个直径方向的平面度偏差为x、y、z。而平晶Ⅰ-Ⅱ、Ⅰ-Ⅲ、Ⅱ-Ⅲ组合时测出的干涉带弯曲量为a、b、c,则它们的关系为: x+y=a x+z=b y+z=c (1)即可求出 x=1/2(a+b-c) y=1/2(a+c-b) z_1/2(a+c-a) 上述平晶检定方法被广泛应用。然后,只有当平
First, the problem proposed to measure the flatness of the flatness by the method of equal thickness interference, often carried out on a planar interferometer, compared with the standard flat crystal, observe the size of the bend through the diameter of the interference zone within the field of view. Calculation method: Multiply λ / 2 by the ratio of the interference band bending size to the distance between two interference bands, that is, the flatness deviation (λ is the light wavelength). When the lack of standard flat crystal, also available three-way test. The three flat crystals are Ⅰ, Ⅱ and Ⅲ, respectively, and their flatness deviations in the same diameter direction are x, y and z. While the flatness of the interference bands I, II, I-III and II-III are a, b and c, the relationship is: x + y = a x + z = b y + z = x = 1/2 (a + bc) y = 1/2 (a + cb) z_1 / 2 (a + ca) The above-mentioned flat crystal verification method is widely used. Then only flat