本文用X射线面分布分析及电子探针测定了离子硫氮碳共渗层内硫、氮、碳的成份分布。测试结果表明,硫主要集中于表面疏松层中以及与次表面化合物层的交界处,氮的最高浓度通常出现在次表面化合物层最靠外的地方;而碳的最高浓度峰值随处理时间的延长向内部移动,并且出现两个峰值。同时,还叙述了不同离子硫氮碳共渗工艺对其渗层内成份分布的影响。 In this paper, the distribution of sulfur, nitrogen and carbon in the ion-sulfurized nitrocarburizing layer was determined by X-ray surface distribution analysis and electron probe. The results showed that sulfur mainly concentrated in the surface loose layer and the interface with the subsurface compound layer. The highest concentration of nitrogen usually appeared in the outermost layer of the subsurface compound layer. The peak of the highest carbon concentration peak increased with the processing time Moves inward and two peaks appear. At the same time, the effects of different ion Sulfur Nitrocarburizing process on the composition distribution in the infiltration layer are also described.