“集成电路制造关键装备用高精密碳化硅陶瓷部件研制技术”是中国建筑材料科学研究总院为清华大学等单位承担的国家科技重大专项“极大规模集成电路制造与成套工艺专项”(02专项)中集成电路制造关键制造装备光刻机工件台用碳化硅陶瓷部件配套开展研制的。集成电路产业是信息技术产业的核心,是支撑社会经济发展和保障国家安全的战略性、基础性和先导型产业,其中集成电路关键装备的制造是集成电路产业发展的关键环节。目前集成电路制造高端装备被世界少数几个国 “Integrated circuit manufacturing critical equipment for the development of high-precision silicon carbide ceramic components ” is China Building Materials Research Institute for Tsinghua University and other units of national science and technology major projects “large scale integrated circuit manufacturing and complete set of special ”(02 special) in the manufacture of integrated circuit manufacturing critical lithography machine parts with silicon carbide ceramic parts supporting the development. The integrated circuit industry is the core of the information technology industry. It is a strategic, basic and pre-emptive industry that supports social and economic development and guarantees national security. The manufacture of key equipment for integrated circuits is a key link in the development of the integrated circuit industry. The current high-end integrated circuit manufacturing equipment is the world’s few countries