针对已有的角差法面形检测原理验证装置,分析采用相对测角法测量反射镜表面采样点的斜率并重构面形的测量方式中测角误差的传递方式。通过Matlab软件建立该传递方式的分析模型,并分析测角稳定性误差对面形测量的影响。实验证明该仿真分析的结果可靠有效。 Aiming at the existing verification device of face detection method based on angular difference method, the method of measuring the slope of the sample point on the mirror surface by using the relative measurement method and the transmission method of the measurement error in the reconstructed face shape are analyzed. The analysis model of the transfer mode was established by Matlab software, and the influence of the error of the angle measurement on the profile measurement was analyzed. Experiments show that the simulation results are reliable and effective.