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针对准分子激光器的相关应用,对准分子激光进行光谱控制是非常必要的。相关光谱控制主要包括激光线宽窄化及激光中心波长的稳定输出,常用的线宽压窄方式是利用扩束棱镜组结合光栅构成线宽压窄模块达到激光线宽窄化的效果。利用熔融石英(FS)等腰直角棱镜与光栅的组合实现了线宽0.957pm的ArF准分子激光输出。理论分析和实验结果表明,作为深紫外波段的良好通光材料,熔融石英棱镜可以实现与常用氟化钙(CaF2)棱镜相近的线宽压窄结果。同时作为等腰直角方式设计,具有更高的切割成型工艺精度、更低的使用维护成本和更广泛的应用价值。
For the related applications of excimer lasers, it is necessary to control the molecular laser for spectral control. The related spectral control mainly includes the narrowing of the laser linewidth and the stable output of the laser center wavelength. The common linewidth narrowing mode is the effect of narrowing the laser linewidth by using the beam expanding prism group combined with the grating to form the linewidth narrowing module. ArF excimer laser output with a linewidth of 0.957 pm was achieved using a combination of isosceles right-angled prisms and gratings of fused silica (FS). Theoretical analysis and experimental results show that, as a good light-transmitting material in the deep ultraviolet region, fused-silica prisms can achieve the narrow linewidth narrowing similar to that of common calcium fluoride (CaF2) prisms. At the same time as a rectangular design isosceles, with a higher precision cutting technology, lower maintenance costs and more extensive application.