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本文在微观粒子运动动力学的基础上，考察了在光学薄膜成膜过程中，不同的基底界面特性和不同的沉积环境，以及粒子本身的动能和位置势能等因素对薄膜微观结构的影响，并对薄膜微观结构特征进行了分析和讨论。
In this paper, based on the kinetics of microscopic particles, the effects of different substrate interface characteristics and different depositional environments, kinetic energy and potential energy of the particles on the microstructure of the films during the optical film formation process are investigated. The microstructure characteristics of the films were analyzed and discussed.