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建立了真空阴极弧离子镀圆形平面靶侧面引弧时 ,阴极斑点的受力模型 ,分析了影响电弧运动的因素 ,改进了圆形平面靶侧面形状 ,大大提高了石墨靶阴极斑点从侧面到靶平面的过渡速度
The force model of the cathode spot when the arc cathode arc ion plating was applied on the circular plane arc was established. The factors affecting the arc motion were analyzed. The shape of the circular plane target side surface was improved. The cathode spot of the graphite target was greatly improved from side to side The transition speed of the target plane