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一、概述离子注入工艺现已用来改进钢和其它金属及其合金的磨损阻抗。1979年我们的实验表明:将氮离子注入到钢中可以明显地改善钢的磨损性能。但是,注入的剂量必须大于10~(17)N~+/cm~2。如果注入剂量小于10~(17)N~+/cm~2,钢的磨损性能不可能得到明显改善(见图1)。高剂量的注入,会使材料表面受到辐照损伤。在受离子轰击的区域内,将产生间隙群空穴串、位错网等缺陷。加之,外来原子的注入,造成被离子轰击的区域体积增加,出现肿胀,产生横向压应力。离子注入后究竟是什么原因改善了钢的磨损阻抗,是注入后形成的缺陷或注入后表面层产生的横向应力所致,还是注入外来原子起了作用。为了进一步究明其原因,我们继续进行了实验研究,现将该实验的方法、结果
I. Overview Ion implantation process is now used to improve the wear resistance of steel and other metals and their alloys. Our experiments in 1979 showed that the injection of nitrogen ions into the steel significantly improves the wear properties of the steel. However, the injection dose must be greater than 10 ~ (17) N ~ + / cm ~ 2. If the injection dose is less than 10 ~ (17) N ~ + / cm ~ 2, the wear performance of steel can not be significantly improved (see Figure 1). High doses of injection can cause surface damage to the material. In the ion bombardment of the region, will produce gap group hole string, dislocation network and other defects. In addition, the injection of foreign atoms, resulting in ion bombarded by the region increased volume, swelling, resulting in lateral compressive stress. What exactly is the reason for the ion implantation improves the wear resistance of the steel, which is caused by the defects formed after the implantation or by the lateral stress generated by the surface layer after implantation or by the implantation of foreign atoms. In order to further clarify the reasons, we continue the experimental study, now the experimental method, the results