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介绍了SiO2/PI1/Al/PI2挡光技术的原理及其制作工艺过程。通过采用SiO2/聚酰亚胺(PI1)/Al/PI2挡光技术,实现了真正意义上的日盲紫外成像。此技术主要应用于日盲型AlGaN紫外焦平面阵列。
The principle of SiO2 / PI1 / Al / PI2 light blocking technology and its manufacturing process are introduced. Through the use of SiO2 / polyimide (PI1) / Al / PI2 block light technology, to achieve a true sense of the blind solar UV imaging. This technology is mainly used in solar-blind AlGaN UV focal plane array.