本文研究了Ta-Cl_2-H_2体系在45钢表面化学气相沉积钽涂层工艺,讨论了钽的沉积速度与温度、五氯化钽和氢气压力之间的关系。本文还扼要介绍了用金相、x射线衍射和电子探针分析等方法测定涂层结构的研究结果。腐蚀试验结果表明,涂层样品在37.7％HCl,63％H_2SO_4介质中具有很高的抗蚀能力,其腐蚀速率比未涂层的可降低2～3个数量级。 In this paper, the Ta-Cl_2-H_2 system was deposited on the surface of 45 steel by chemical vapor deposition of tantalum, and the relationship between deposition rate of tantalum and temperature, tantalum pentachloride and hydrogen pressure was discussed. This article also briefly describes the results of metallographic, x-ray diffraction and electron probe analysis of the coating structure. The corrosion test results show that the coating samples have high corrosion resistance in 37.7% HCl and 63% H 2 SO 4 media, and their corrosion rates are reduced by 2 to 3 orders of magnitude compared with the uncoated ones.