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本文叙述了用CCD系统对MBE生长中RHEED图案强度变化进行实时监测，通过（00）级条纹的RHEED强度分析，直接给出了不同生长条件下表面相变的动态过程，得到了从C（4×4）到α（2×4）的连续相变过程，进一步给出了不同条件下的表面化学配比情况．
In this paper, the CCD system was used to monitor the intensity of RHEED pattern in MBE growth in real time. By the RHEED intensity analysis of (00) streaks, the dynamic process of surface phase transition under different growth conditions was given directly. × 4) to α (2 × 4) continuous phase transformation process, further gives the surface chemical ratio under different conditions.