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通过线聚焦将自滤波振荡行波放大后的铜激光在ＢＢＯ晶体中信频，当基频光功率为５．４Ｗ时，倍频效率达１４．４％。用钢激光倍频光进行接触式光刻，刻线分辨率优于１．０μｍ。
By line focusing, the copper laser amplified by the filtered oscillating traveling wave is in the BBO crystal. When the fundamental optical power is 5.4W, the frequency doubling efficiency reaches 14.4%. Contact laser photolithography with steel laser, the reticle resolution is better than 1.0μm.