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综合介绍了激光处理聚酰亚胺等高分子聚合物材料及其在微电子工业中一些新的应用,阐述了材料在吸收激光能量后产生的一系列可能会发生的能量转换和一些令人感兴趣的改性。此外还着重介绍了聚酰亚胺材料的激光感应电导在近几年的研究进展以及我们在这方面的研究工作。这一工作在精细加工和微制造工业,尤其是在对提高集成电路的集成度、缩小集成电路内部器件尺寸等方面有广泛的应用前景。
This paper introduces the synthesis of laser-treated macromolecule polymer materials such as polyimide and some new applications in the microelectronics industry. It expounds a series of possible energy conversion and some sensation of the material after it absorbs laser energy Modification of interest. In addition, the research progress of laser induced conductance of polyimide materials in recent years and the research work in this area are also introduced. This work has a wide range of applications in the microfabrication and micromanufacturing industries, especially in improving the integration of integrated circuits and reducing the size of integrated circuits.