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目前为了把铝-镍-金应用到高频晶体管中去,已尝试制做薄的铝-镍-金多层电极。结果,下列因素已经清楚,而且具有实用价值。 (1)这些电极与梁式引线型电极相比,更容易制造。它们可以容易地形成精确的图形,它们的宽度和间距是2微米。 (2)不管杂质类型如何,如果扩散的杂质表面密度不小于1×10~(20)厘米~(-3)的话,都可以得到10~(-6)欧姆·厘米~2这样低的接触电阻。 (3)即使对于浅的泡发射极(它的深度为0.2微米)也可以使形成的欧姆接触具有一个低的电阻。
At present, in order to apply aluminum-nickel-gold to high-frequency transistors, thin aluminum-nickel-gold multilayer electrodes have been tried. As a result, the following factors are clear and have practical value. (1) These electrodes are easier to manufacture than the beam type lead electrodes. They can easily form accurate patterns with widths and pitches of 2 microns. (2) Low contact resistance of 10-6 ohm.cm-2 can be obtained if the surface density of the diffused impurity is not less than 1x10 to (20) cm-3 irrespective of impurity type . (3) The formed ohmic contact can have a low resistance even with a shallow bubble emitter (its depth is 0.2 microns).