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本文研究了金、聚四氟乙烯以及石墨等添加物对二硫化钼共溅射膜摩擦学性能的影响。与MoS_2溅射膜相比,MoS_2-Au共溅射膜具有非常优异的摩擦学性能,特别是在高真空条件下;MoS_2-石墨共溅射膜的抗湿性有了很大的改善;而MoS_2-PTFE共溅射膜的摩擦学性能却没有多大改善,这是因为氟在溅射过程中有所损失造成的。合适的偏压溅射可以提高MoS_2基共溅射膜的耐磨寿命。在底材为AISI 440C不锈钢、中间层为铑(5μm)、球为红宝石(单晶)及相对湿度大于98％时的特殊摩擦体系中,MoS_2基共溅射膜具有非常长的耐磨寿命。
In this paper, the effects of additives such as gold, polytetrafluoroethylene and graphite on the tribological properties of molybdenum disulfide co-sputtering films were studied. Compared with MoS_2 sputtering film, MoS_2-Au co-sputtering film has very good tribological properties, especially under high vacuum conditions; MoS_2-graphite co-sputtering film has greatly improved moisture resistance; and MoS_2 The tribological properties of PTFE co-sputtered films have not been much improved, due to the loss of fluorine during the sputtering process. Appropriate bias sputtering can improve the wear life of MoS_2-based co-sputtering film. The MoS2-based co-sputtered film has a very long wear life in a special tribological system with AISI 440C stainless steel substrate, rhodium intermediate layer (5 μm), ruby (single crystal) ball and relative humidity greater than 98%.