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The combination of shearing interferometer, Fourier-transform profilometry, phase unwrapping by lockup table method has resulted in a new and more powerful method of measuring surface profile. The technique permits the three-dimensional shape measurement of objects that have discontinuous height steps. Experimental results have demonstrated the validity of the principle.
The combination of shearing interferometer, Fourier-transform profilometry, phase unwrapping by lockup table method has resulted in a new and more powerful method of measuring surface profile. The technique permits the three-dimensional shape measurement of objects that have discontinuous height steps. have demonstrated the validity of the principle.