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根据国际ISO10110-7的表面缺陷标准及惯性约束聚变(ICF)工程标准,提出了一种新颖的光学元件表面缺陷的光学显微散射成像及数字化评价系统,多束光纤冷光源呈环状分布并以一定角度斜入射到数毫米视场的被检表面,形成适合数字图像二值化处理的暗背景上的亮疵病图像。对X,Y两方向进行子孔径图像扫描成像,利用模板匹配原理对获得的子孔径图像进行拼接得到全孔径表面疵病图像信息。基于数学形态学建立了可用于大口径表面检测扫描的图像处理的模式识别软件体系,并应用二元光学制作了标准对比板,以获得疵病正确的评价依据。最终利用该变倍光学显微镜散射成像系统得到能分辨微米量级表面疵病的图像,其单个子孔径物方视场约为3 mm,对X,Y两方向进行5×5子孔径图像扫描成像,并给出了与标准比对的定量数据结果。实验结果表明,本系统完全可以实现光学元件表面缺陷的数字化评价。
According to the international standard of surface defect and international standard of inertial confinement fusion (ICF) of ISO10110-7, a novel optical microscopic scattering imaging and digital evaluation system for surface defects of optical components is proposed. The multi-beam optical fiber cold light source is annularly distributed Obliquely incident on a test surface of a few millimeters of field of view at an angle to form a flawed image on a dark background suitable for digital image binarization. Sub-aperture image scanning imaging is carried out in both X and Y directions. The obtained sub-aperture image is spliced by the template matching principle to obtain the image information of the full aperture surface defect. Based on the mathematical morphology, a pattern recognition software system for image processing of large-aperture surface inspection scanning was established, and a standard comparison plate was made by using binary optics to obtain the correct evaluation basis of the flaw. Finally, the variable magnification optical microscope imaging system was used to obtain images that can distinguish surface defects on the order of microns. The field of view of a single subaperture object was about 3 mm. The 5 × 5 subaperture images were scanned in both X and Y directions , And gives the results of quantitative data compared with the standard. The experimental results show that this system can fully realize the digital evaluation of the surface defects of optical components.