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工作方向:以半导体光电子器件的工程化研究与开发为目标。为市场提供优质的光电子器件、提供系统的、集成化的全套生产技术,促进我国光电子产业的发展。主要内容:建有一条先进的光电子器件中试工艺线,配备有多台大型进口设备,能满足光电子器件的材料生长、测试以及装配与封装和可靠性试验的需要。主要装备有:金属有机物化学沉积生长系统(MOCVD),程序控制多源、多功能、高真空蒸发系统、溅射系统、等离子CVD、等
Work direction: the semiconductor optoelectronic devices engineering research and development as the goal. To provide the market with high-quality optoelectronic devices, to provide systematic and integrated production technology to promote the development of China’s optoelectronics industry. Main Content: There is an advanced pilot circuit for optoelectronic devices, equipped with several large-scale imported equipment to meet the needs of material growth, testing, assembly and packaging and reliability testing of optoelectronic devices. Major equipment: metal organic chemical deposition growth system (MOCVD), process control multi-source, multi-function, high vacuum evaporation system, sputtering system, plasma CVD, etc.