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大口径低温泵测试系统可为环模设备低温泵提供完整的性能参数。本文介绍了一种大口径、大抽速低温泵的测试系统,对各分系统结构功能进行了详细描述。其使用流量法和流导法两种方法提供在1×10-6 Pa至10 Pa范围内的抽速、预冷时间、极限真空度等参数的测量。此系统同时具有加热烘烤和可调节气体流量的功能。
Large-caliber cryogenic pump test system for the ring die-type cryogenic pump to provide complete performance parameters. This paper introduces a test system of large caliber and large pumping speed cryogenic pump, and describes the structure and function of each subsystem in detail. It uses the flow method and the flow guide method to provide two measures of pumping speed, pre-cooling time, ultimate vacuum and other parameters in the range of 1 × 10-6 Pa to 10 Pa. This system also has the function of heating roasting and adjustable gas flow.