论文部分内容阅读
在激光传输光路中加入掩模对激光束进行空间调制,采用纳秒脉冲激光器、纳秒脉冲电源和1 mol/L的NaNO3电解液对304不锈钢进行掩模微刻蚀加工试验研究。利用伏安法测定304不锈钢阳极电流随平均电压的变化规律;选用平均电压1.5 V、脉冲频率2.0 MHz、脉冲宽度60 ns、激光能量160 mJ的工艺参数,在所构建的试验系统中,分别进行了激光电化学复合掩模和盐溶液中的激光掩模加工试验。结果表明:在阳极钝化区内,纳秒脉冲激光电化学复合加工能够显著提高加工速率和加工表面质量,实现了线宽约为130μm、热影响区小的微细刻蚀加工,证实了纳秒脉冲激光电化学掩模加工在微细加工中具有很大潜力。
The laser beam is spatially modulated by adding a mask in the laser transmission path, and the micro-etching process of 304 stainless steel is studied by nanosecond pulsed laser, nanosecond pulse power and 1 mol / L NaNO3 electrolyte. The variation of anodic current of 304 stainless steel with the average voltage was measured by voltammetry. The process parameters of 1.5 V average pulse voltage, 2.0 MHz pulse width, 60 ns pulse width and 160 mJ laser energy were selected. Laser photomask compound mask and laser mask processing experiment in salt solution. The results show that nanosecond pulsed laser electrochemical machining can significantly improve the processing speed and surface quality in the passivation region of the anodes, and achieve the fine etching process with a linewidth of about 130μm and a small heat-affected zone. The nanosecond Pulsed laser electrochemical mask processing has great potential in microfabrication.