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利用“动态吸气法”测试了Ti-Mo吸气材料在不同工作温度条件下吸气性能的变化,采用四极质谱仪监测激活过程中真空腔体内残余气体成分及含量。结果表明:工作温度越高,材料的起始吸气速率越高,但当工作温度高于400℃后,随着温度的升高总吸气容量反而下降;在400℃条件下吸气后,材料具备良好的激活再生能力,但是经500℃吸气后,材料长期维持真空的能力降低,总吸气容量受损;随着温度的升高,H2O、CO2及碳氢化合物逐渐从吸气材料表面脱附,H2主要在200℃以上温度脱附,整个激活过程未发现O2。
The change of gettering performance of Ti-Mo getter material under different working temperature conditions was tested by “Dynamic Inspiratory Method”. The composition and content of residual gas in the vacuum chamber were monitored by quadrupole mass spectrometer. The results show that the higher the working temperature, the higher the initial suction rate of the material, but when the operating temperature is higher than 400 ℃, the total aspiration capacity decreases with the increase of the temperature. After inhalation at 400 ℃, The material has a good ability to activate regeneration, but after 500 ℃ inspiratory, the ability of the material to maintain a long-term vacuum is reduced, the total inspiratory capacity is impaired; as the temperature rises, H2O, CO2 and hydrocarbons gradually from the getter material Surface desorption, H2 desorption temperature above 200 ℃, the entire activation process found no O2.