论文部分内容阅读
分析了影响金刚石膜热导率的主要因素，指出声子的散射是造成金刚石膜热导率降低的主要原因．采用光热偏转法实现了金刚石薄膜热导率的测试，测量误差小于５％，从减少杂质和晶界对导热声子的散射入手，研究了在不同的制备方法下碳源气体和金刚石膜内晶粒取向对其热导率的影响．结果表明在低碳源气体浓度下采用微波等离子体化学汽相沉积方法制备的具有较高程度（４００）晶粒取向的金刚石薄膜具有高的热导率性质．优化的工艺条件制备出热导率为１５２Ｗ／（Ｋ·ｃｍ）左右的金刚石膜．
The main factors that affect the thermal conductivity of diamond films are analyzed. It is pointed out that the phonon scattering is the main reason for the decrease of thermal conductivity of diamond films. The thermal conductivity of diamond thin films was tested by photothermal deflection method. The measurement error was less than 5%. Starting from the reduction of the scattering of thermal phonons by impurities and grain boundaries, the effects of carbon source gas and diamond film Effect of Grain Orientation on Thermal Conductivity. The results show that diamond films with a higher degree of (400) grain orientation prepared by microwave plasma chemical vapor deposition at low carbon source gas concentrations have high thermal conductivity properties. The optimum conditions were as follows: a diamond film with a thermal conductivity of 15 2W / (K · cm) was prepared.