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本文记述了我国研制与生产的各种电子显微镜 ,主要是透射电子显微镜 ,扫描电子显微镜和电子探针X射线微区分析仪。 1 95 8~ 1 95 9年中国科学院长春光学精密机械研究所制成了我国第一台电子显微镜 ,又率先自行设计研制完成 1 0 0kV大型电子显微镜。根据 1 996~ 1 997年国家科委组织的一项调查 ,当时我国拥有 2 0 2 1台电子显微镜 ,包括透射电子显微镜 75 6台 ,扫描电子显微镜 1 1 6 5台 ,合计 1 92 1台。其中 ,进口 91 5台 ,占 4 7.6 % ;我国生产了 1 0 0 6台 ,占 5 2 .4 % ,但大多为中、低档产品。中国科学院北京科学仪器研制中心KYKY ,上海电子光学技术研究所和南京光学仪器厂生产的占国产 1 0 0 6台中的 95 %以上。云南大学 ,北京仪器厂 ,上海第三分析仪器厂和国营 4 5 0 3厂也分别研制或生产了几种透射电子显微镜和扫描电子显微镜
This article describes a variety of electronic microscopes developed and produced in China, mainly transmission electron microscopy, scanning electron microscopy and electron probe X-ray microanalysis. 1 958-1955 Changchun Institute of Optics, Fine Mechanics, Chinese Academy of Sciences made the first electron microscope in our country, and took the lead in designing and completing a large-scale 100kV electron microscope. According to a survey conducted by the State Science and Technology Commission from 1996 to 1997, there were 2,021 electron microscopes in our country, including 756 transmission electron microscopes and 1,165 scanning electron microscopes, totaling 1,192 units. Among them, 91 were imported, accounting for 37.6% of the total. China produced 106 units, accounting for 52.4% of the total, but mostly middle and low-grade products. KYKY, Beijing Scientific Instrument Development Center, Chinese Academy of Sciences, accounted for more than 95% of the domestic total of 106 Taichung produced by Shanghai Institute of Optics and Electronics Technology and Nanjing Optical Instrument Factory. Yunnan University, Beijing Instrument Factory, Shanghai Third Analytical Instrument Factory and the state-owned 4 5 0 3 plant have also developed or produced several transmission electron microscope and scanning electron microscope