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本文进行了对模具表面离子镀TiN薄膜的研究,本实验采用直流二极型离子镀,实验设备是由一台真空镀膜机改装而成。离子镀是一个很复杂的过程,这是由于此过程中的参数很多,例如,基体与蒸发源间的距离、活化反应过程中的氮分压与氩分压、基偏压、蒸发电流、基体温度等。在我们的实验条件下,模具的表面得到了理想的镀层,TiN镀层呈金黄色,其平均厚度为2.5—3.0μm、显微硬度达2000—2200kg/mm~2,附着力为1.5—2.0kg/mm~2。这种经离子镀处理过的模具,其使用寿命可以延长3—4倍。
In this paper, ion-plating TiN film on the mold surface of the study, the experiment DC DC ion plating, the experimental equipment is a vacuum coating machine converted from. Ion plating is a complicated process due to many parameters in this process, for example, the distance between the substrate and the evaporation source, the partial pressure of nitrogen and partial pressure of argon during the activation reaction, the base bias voltage, the evaporation current, Temperature and so on. Under our experimental conditions, the surface of the mold obtained the ideal coating, TiN coating was golden yellow, the average thickness of 2.5-3.0μm, micro-hardness of 2000-2200kg / mm ~ 2, adhesion of 1.5-2.0kg / mm ~ 2. This ion-plated mold, the service life can be extended 3-4 times.