近年来,精细冶金术发展很快,它开辟了一个崭新的材料加工领域,创造了各种前所未有的新的功能材料,把机电、仪器仪表、工具、电子,特别是半导体工业推到了一个更高的发展阶段。离子植入术就是其中的一个重要成就。离子植入术简称为离子注。它的实质是,当金属表面在遭受到被植入物质的原子轰击时,这些被植入的原子就嵌入被加工的金属表层原子之间。通过这种处理,可以改变几乎所有金属表面的特性。例如经过这种处理,可以使那些价格昂贵的贵重仪器和工具的主要元器件的使用寿命提高很多倍。离子注的应用是多方面的,如采用离子注可以显著地改进沉积在初加工金属表面上 In recent years, the rapid development of fine metallurgy, which opened up a new field of materials processing, creating a variety of unprecedented new functional materials, mechanical and electrical, instrumentation, tools, electronics, especially the semiconductor industry pushed to a higher The development stage. Ion implantation is one of the major achievements. Ion implantation is called ion injection. Its essence is that when the metal surface is bombarded by the atoms of the implanted material, these implanted atoms are embedded between the atoms of the metal surface being processed. With this treatment, the properties of almost any metal surface can be changed. By doing this, for example, the service life of the main components of expensive instruments and tools can be many times increased. The application of ion injection is multifaceted, such as the use of ion implantation can be significantly improved deposition on the initial processing of metal surfaces