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如何有效地协调和平衡材料强度与韧性之间的矛盾,大幅提高结构材料的损伤容限,是设计微观结构敏感性材料的巨大挑战.纳米金属多层膜材料由于其灵活可调控的微观结构特征以及优异的力学性能已成为目前高性能微元器件以及互连结构的核心材料体系,其服役过程中的变形损伤与断裂是导致系统失效的关键因素.本文结合当前国内外有关金属多层膜塑性变形与断裂行为研究的最新进展,阐述了金属多层膜(微柱体)微观结构-尺寸约束-服役性能三者之间的关联性,揭示了金属多层膜(微柱体)变形与断裂模式的内在规律及机制,并对金属多层膜研究的发展趋势进行了展望.
How to effectively coordinate and balance the contradiction between material strength and toughness and greatly improve the damage tolerance of structural materials is a great challenge to design microstructural sensitive materials.As a result of its flexible and controllable microstructure characteristics And excellent mechanical properties have become the core material system of high-performance micro-devices and interconnection structures, and the deformation damage and fracture during service are the key factors leading to system failure.This paper combines the current domestic and international research on the plasticity Deformation and fracture behavior of the latest progress, elaborated on the metal multilayer film (micro-cylinder) microstructure - dimensional constraints - service performance of the relationship between the three revealed the metal multilayer (micro-cylinder) deformation and fracture Mode of the inherent laws and mechanisms, and the development of metal multilayer research trends are prospected.