Investigation on the cleaning of KDP ultra-precision surface polished with micro water dissolution

来源 :中国科学：技术科学英文版 | 被引量 : 0次 | 上传用户：wdasheng

【摘要】

：

钾 dihydrogen 磷酸盐(KDP ) 光水晶与 water-in-oil (W/O ) 被用机器制造到极端精确的表面微乳剂擦亮液体。在用机器制造的过程利用的微水溶解原则被讨论，它的 planarization

【作者】

：

CHEN YuChuan GAO Hang WANG Xu

【机构】

：

KeyLaboratoryforPrecisionandNon-TraditionalMachiningTechnologyofMinistryofEducation

【出处】

：

中国科学：技术科学英文版

【发表日期】

：

2017年1期

【关键词】

：

KDP晶体清洗方法超精密抛光加工原理抛光表面水溶解傅里叶变换红外光谱表面粗糙度 KDP optical crystal micro water

【基金项目】

：

the National Natural Science Foundation of China （Grant No. 51135002） and the Specialized Research Fund for the Doctoral Program of Higher Education （Grant No. 51321004）.

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论文部分内容阅读

钾 dihydrogen 磷酸盐(KDP ) 光水晶与 water-in-oil (W/O ) 被用机器制造到极端精确的表面微乳剂擦亮液体。在用机器制造的过程利用的微水溶解原则被讨论，它的 planarization 机制被说明，并且有 2.205 nm RMS 粗糙的极端精确的擦亮的表面被获得。然而，剩余污染的实质的数量在用机器制造以后在擦亮的表面上留下了。这能严重影响水晶的光表演，它必须因此被移开。Fourier 变换红外线(FTIR ) 光谱学被用来进行调查进表面残余的作文，并且结果证明残余与烃链和

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Investigation on the cleaning of KDP ultra-precision surface polished with micro water dissolution

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